Title :
Fabrication of an electrodeposited nickel membrane for microflow control
Author :
Tijero, M. ; Garcia, J. ; Berganzo, J. ; Blanco, F. ; Aramburu, I. ; Ruano-López, J.M. ; Agirregabiria, M. ; Arroyo, M. ; Mayora, K.
Author_Institution :
MEMS/MST Dept., Ikerlan S.Coop., Guipuzcoa, Spain
Abstract :
This paper describes the fabrication method of a novel electrodeposited nickel membrane. Different polymer photoresist and new photolithographic process have been developed and optimised at a wafer level. This low cost technology provides a good alternative to integrate actuated microvalves for flow control in a lab-on-a-chip device.
Keywords :
electrodeposition; membranes; microfluidics; microvalves; nickel; optical polymers; photoresists; silicon compounds; 100 mm; 525 micron; Ni; actuated microvalves; electrodeposited nickel membrane fabrication; lab-on-a-chip device; microflow control; photolithography; polymer photoresist; wafer level; Biomembranes; Costs; Fabrication; Lab-on-a-chip; Microvalves; Nickel; Polymers; Resists; Silicon; Valves;
Conference_Titel :
Electron Devices, 2005 Spanish Conference on
Print_ISBN :
0-7803-8810-0
DOI :
10.1109/SCED.2005.1504358
