Author :
Matsuki, Hirohisa ; Watanabe, Eiji ; Kado, Kenichi ; Fujimori, Jouji ; Mizukoshi, Masataka ; Kawahara, Toshimi ; Kasai, Junichi
Conference_Titel :
IEMT/IMC Symposium, 1997., 1st [Joint International Electronic Manufacturing Symposium and the International Microelectronics Conference]