Title :
Multiparametric gas sensors with porous silicon optical microcavities
Author :
Gaburro, Z. ; Faglia, G. ; Baratto, C. ; Sberveglieri, G. ; Pavesi, L.
Author_Institution :
INFM & Dept. of Phys., Trento Univ., Italy
Abstract :
We show that porous silicon optical microcavities can be effectively used as multiparametric gas sensors. Beside the electrical conduction, interesting gas-sensing parameters of porous silicon microcavities are the photoluminescence intensity and the spectral position of the resonance cavity peak, which depends on the index of refraction of the surrounding gas. The dynamic response of the peak shift is also discussed
Keywords :
dynamic response; elemental semiconductors; gas sensors; micro-optics; optical sensors; photoluminescence; porous semiconductors; silicon; Si; cavity dielectric mirrors; dynamic response; electrochemical etching; ethanol filling; gas penetration dynamics; high resistivity samples; multiparametric gas sensors; p-type wafers; peak shift; photoluminescence intensity; porous silicon optical microcavities; refraction index; resonance cavity peak; Gas detectors; Gases; Microcavities; Optical filters; Optical refraction; Optical sensors; Optical variables control; Photoluminescence; Resonance; Silicon;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967408
