Title :
Nanowires electroforming of nanoporous electrodes
Author :
Hubálek, Jaromír
Author_Institution :
Dept. of Microelectron., Brno Technol. Univ., Czech Republic
Abstract :
Last ten years the nanotechnologies are in a centre of scientific interest. These new techniques bring new nanostructured materials for utilization in microelectronics processes. Anodization of aluminum under specific condition enables to create ordered nanoporous structure in growing alumina. Nanopores are distributed with regular ordering in honeycomb-like cells. The nanoporous thin film was used as template for metal nanowires electrodeposition. Metal ions were deposited on electrode through nanoporous template. Metal nanowires and nanotubes were formatted on the electrode to increase its cross-sectional area.
Keywords :
aluminium; anodisation; electrodeposition; electroforming; microelectrodes; nanoporous materials; nanostructured materials; nanotechnology; nanowires; Al; aluminum anodization; electrodeposition; electroforming; microelectronics processes; nanopores; nanoporous electrodes; nanoporous thin film; nanostructured materials; nanotechnology; nanotubes; nanowires; Cathodes; Chemical sensors; Electrochemical processes; Electrodes; Fabrication; Microelectrodes; Microelectronics; Nanoporous materials; Nanowires; Transistors;
Conference_Titel :
Electron Devices, 2005 Spanish Conference on
Print_ISBN :
0-7803-8810-0
DOI :
10.1109/SCED.2005.1504361
