Nanowires electroforming of nanoporous electrodes

Author

Hubálek, Jaromír

Author_Institution

Dept. of Microelectron., Brno Technol. Univ., Czech Republic

fYear

2005

fDate

2-4 Feb. 2005

Firstpage

217

Lastpage

220

Abstract

Last ten years the nanotechnologies are in a centre of scientific interest. These new techniques bring new nanostructured materials for utilization in microelectronics processes. Anodization of aluminum under specific condition enables to create ordered nanoporous structure in growing alumina. Nanopores are distributed with regular ordering in honeycomb-like cells. The nanoporous thin film was used as template for metal nanowires electrodeposition. Metal ions were deposited on electrode through nanoporous template. Metal nanowires and nanotubes were formatted on the electrode to increase its cross-sectional area.

Keywords

aluminium; anodisation; electrodeposition; electroforming; microelectrodes; nanoporous materials; nanostructured materials; nanotechnology; nanowires; Al; aluminum anodization; electrodeposition; electroforming; microelectronics processes; nanopores; nanoporous electrodes; nanoporous thin film; nanostructured materials; nanotechnology; nanotubes; nanowires; Cathodes; Chemical sensors; Electrochemical processes; Electrodes; Fabrication; Microelectrodes; Microelectronics; Nanoporous materials; Nanowires; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices, 2005 Spanish Conference on

Print_ISBN

0-7803-8810-0

Type

conf

DOI

10.1109/SCED.2005.1504361

Filename

1504361