Title :
Technology of silicon nano- and microelectrode arrays for pollution control
Author :
Kleps, Kina ; Angelescu, Anca ; Miu, Mihaela ; Avram, Marioara ; Simion, Monica
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnologies (IMT), Bucharest, Romania
Abstract :
A very simple fabrication technology for a new electrode array architecture with metal/dielectric pyramidal nanostructures and disk microstructures on silicon is described. This working electrode is intended for measurements and detection of metallic traces in liquid media
Keywords :
arrays; electrochemical electrodes; electrochemical sensors; elemental semiconductors; etching; microelectrodes; micromachining; microsensors; nanotechnology; oxidation; photolithography; silicon; voltammetry (chemical analysis); water pollution measurement; Si; aqueous media; chemical sensor elements; cyclic voltammetry; disk microstructures; metal/dielectric pyramidal nanostructures; metallic film deposition; metallic traces detection; microelectrode arrays; nanoelectrode array; optimum support oxide thickness; photolithographic process; pollution control; silicon etching; simple fabrication technology; steady-state limiting current; thermal oxidation; toxic heavy metals; ultramicroelectrodes; Chemical sensors; Chemical technology; Electrodes; Etching; Fabrication; Microelectrodes; Nanostructures; Pollution control; Silicon; Substrates;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967413
