DocumentCode
1932097
Title
Determination of scanning parameters in intermittent contact operation mode AFM
Author
Oprea, I. ; Gavrila, R. ; Dinescu, A. ; Oprica, R.
Author_Institution
R&D Inst. for Microtechnology, Bucharest, Romania
Volume
1
fYear
2001
fDate
2001
Firstpage
67
Abstract
Intermittent-contact mode Atomic Force Microscopy (Ic-AFM) is a powerful tool especially dedicated to soft samples imaging. Experimental determinations of parameters required for proper Ic-AFM operation have been performed by studying the system response to exciting oscillation and the probe-sample approach curve in near resonance conditions for a particular sample
Keywords
atomic force microscopy; IcAFM; atomic force microscopy; intermittent contact mode; scanning parameters; soft sample imaging; Atomic force microscopy; Biological materials; Elasticity; Material properties; Probes; Research and development; Resonance; Resonant frequency; Surface morphology; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location
Sinaia
Print_ISBN
0-7803-6666-2
Type
conf
DOI
10.1109/SMICND.2001.967418
Filename
967418
Link To Document