DocumentCode
1932273
Title
Tunnelling in implanted emitter-base junctions in a low-power UHF process
Author
Schlicht, B. ; Strobel, L.
Author_Institution
Philips GmbH, Röhren- und Halbleiterwerke, D-2000 Hamburg 54, FRG
fYear
1990
fDate
10-13 Sept. 1990
Firstpage
337
Lastpage
340
Abstract
Tunneling currents in reverse-biased emitter-base junctions were investigated for different implanted base profiles in a low-power UHF process. A trade-off had to be found between improvement of the reverse I-V characteristic of the NPN´s EB junction and deterioration of the device´s HF performance. A semi-theoretical description of the experimental findings is given.
Keywords
Boron; Current measurement; Doping; Electrical resistance measurement; Hafnium; Noise figure; Noise measurement; Surface resistance; Temperature dependence; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1990. ESSDERC '90. 20th European
Conference_Location
Nottingham, England
Print_ISBN
0750300655
Type
conf
Filename
5436346
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