Title :
Applications of RF MEMS to tunable filters and matching networks
Author :
Blondy, P. ; Champeaux, C. ; Tristant, P. ; Mercier, D. ; Cros, D. ; Catherinot, A. ; Guillon, P.
Author_Institution :
IRCOM, CNRS, Limoges, France
Abstract :
This paper summarizes recent developments of micro-electro-mechanical tunable capacitors for RF and microwave applications. Several examples are given, their performances are compared with conventional semiconductor components. Next current tunable resonators and filters at our laboratory are presented. The promises of this new technology are outlined, and some of their limitation are discussed
Keywords :
impedance matching; micromechanical devices; micromechanical resonators; microwave filters; millimetre wave filters; passive filters; radiofrequency filters; resonator filters; tuning; varactors; MEMS varactors; MM-wave filter; RF MEMS; RF applications; RF electromechanical components; insertion losses; matching networks; micro-electro-mechanical capacitors; microwave applications; tunable filters; tunable resonators; tuning range; Capacitors; Conducting materials; Conductors; Matched filters; Micromechanical devices; Microwave devices; Microwave filters; Radio frequency; Radiofrequency microelectromechanical systems; Varactors;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967427
