Applications of RF MEMS to tunable filters and matching networks

Author

Blondy, P. ; Champeaux, C. ; Tristant, P. ; Mercier, D. ; Cros, D. ; Catherinot, A. ; Guillon, P.

Author_Institution

IRCOM, CNRS, Limoges, France

Volume

1

fYear

2001

fDate

2001

Firstpage

111

Abstract

This paper summarizes recent developments of micro-electro-mechanical tunable capacitors for RF and microwave applications. Several examples are given, their performances are compared with conventional semiconductor components. Next current tunable resonators and filters at our laboratory are presented. The promises of this new technology are outlined, and some of their limitation are discussed

Keywords

impedance matching; micromechanical devices; micromechanical resonators; microwave filters; millimetre wave filters; passive filters; radiofrequency filters; resonator filters; tuning; varactors; MEMS varactors; MM-wave filter; RF MEMS; RF applications; RF electromechanical components; insertion losses; matching networks; micro-electro-mechanical capacitors; microwave applications; tunable filters; tunable resonators; tuning range; Capacitors; Conducting materials; Conductors; Matched filters; Micromechanical devices; Microwave devices; Microwave filters; Radio frequency; Radiofrequency microelectromechanical systems; Varactors;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2001. CAS 2001 Proceedings. International

Conference_Location

Sinaia

Print_ISBN

0-7803-6666-2

Type

conf

DOI

10.1109/SMICND.2001.967427

Filename

967427