Title :
Microwave characterization of membrane supported coplanar waveguide transmission lines - electromagnetic simulation and experimental results
Author :
Neculoiu, D. ; Plana, R. ; Pons, P. ; Muller, A. ; Vasilache, D. ; Petrini, I. ; Buiculescu, C. ; Blondy, P.
Author_Institution :
IMT Bucharest, Romania
Abstract :
Membrane supported coplanar waveguides are needed for low-dispersive and low-loss millimeter and submillimeter waves circuits. This paper presents electromagnetic simulations and experimental results for the effective permittivity of membrane supported transmission lines and demonstrate the necessity of computer aided design techniques in the fabrication of the micromachined microwave circuits
Keywords :
coplanar waveguides; membranes; permittivity; simulation; transmission line theory; CAD techniques; CPW transmission lines; computer aided design techniques; coplanar waveguides; effective permittivity; electromagnetic simulations; fabrication; low-dispersive circuits; low-loss circuits; membrane supported CPW; membrane supported transmission lines; micromachined microwave circuits; microwave characterization; millimeter wave circuits; submillimeter wave circuits; Biomembranes; Circuit simulation; Computational modeling; Computer simulation; Coplanar transmission lines; Coplanar waveguides; Distributed parameter circuits; Electromagnetic waveguides; Permittivity; Submillimeter wave circuits;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967434
