Title :
Recent trends in multilayer process simulation for submicron technologies
Author :
Poncet, A. ; Gérodolle, A. ; Martin, S.
Author_Institution :
CNET-Grenoble, BP 98. 38243 MEYLAN-Cedex
Abstract :
Modelling and algorithmic aspects of process simulation for submicron technologies are addressed, with a special emphasis on multi-dimensional and multilayer applications. A bibliography is attached, which is quite exhaustive over the last three years period.
Keywords :
Analytical models; Circuit simulation; Computational modeling; Computer simulation; Discrete event simulation; Integrated circuit modeling; Nonhomogeneous media; Physics computing; Semiconductor process modeling; Solid modeling;
Conference_Titel :
Solid State Device Research Conference, 1990. ESSDERC '90. 20th European
Conference_Location :
Nottingham, England
