Title :
Photoresponse analysis of the photodetector with planar mirror optical microcavity
Author :
Purica, Munizer ; Budianu, Elena ; Cristea, Dana
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania
Abstract :
The dependency of the photoresponse on structural and material parameters was investigated using the expression of quantum efficiency (η) derived for a photodiode with active regions placed inside a planar mirror optical microcavity. This expression takes into account the multiple internal reflection and the wavelength dependence of the top and bottom mirror reflectivity. Experimental results shown the ~40% improvement in the silicon photodiode responsivity at 1060 nm over identical conventional photodiode structure using a two-end planar mirror optical microcavity
Keywords :
infrared detectors; micro-optics; micromechanical resonators; mirrors; photodiodes; reflectivity; silicon; 1060 nm; active regions; bottom mirror reflectivity; material parameters; multiple internal reflection; photodetector; photodiode; photoresponse analysis; planar mirror optical microcavity; quantum efficiency; silicon photodiode responsivity; structural parameters; top mirror reflectivity; wavelength dependence; High speed optical techniques; Microcavities; Mirrors; Optical devices; Optical refraction; Optical sensors; Optical signal processing; Optical variables control; Photodetectors; Photodiodes;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967443
