Thin membranes obtained by surface micromachining-Preliminary study for a Fabry-Perot interferometer

Author

Muller, Raluca ; Manea, Elena ; Kusko, Mihai

Author_Institution

Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania

Volume

1

fYear

2001

fDate

2001

Firstpage

193

Abstract

We report on thin membrane manufacture by surface micromachining. We realized two types of membranes. The first one consists of a stack of SiO₂/Si₃N₄/SiO₂ layers and the second consists of a polysilicon layer. We present simulations for the reflectivity response of the polysilicon membrane. The structure can be used as a Fabry-Perot microcavity for an opto-mechanical pressure sensor

Keywords

Fabry-Perot interferometers; Fabry-Perot resonators; micro-optics; micromachining; micromechanical resonators; optical fabrication; optical sensors; pressure sensors; reflectivity; Fabry-Perot interferometer; Fabry-Perot microcavity; SiO₂-Si₃N₄-SiO₂; SiO₂/Si₃N₄/SiO₂ layers; opto-mechanical pressure sensor; polysilicon layer; polysilicon membrane; reflectivity response; surface micromachining; thin membranes; Biomembranes; Chemical sensors; Etching; Fabry-Perot interferometers; Microcavities; Micromachining; Mirrors; Optical interferometry; Reflectivity; Silicon compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2001. CAS 2001 Proceedings. International

Conference_Location

Sinaia

Print_ISBN

0-7803-6666-2

Type

conf

DOI

10.1109/SMICND.2001.967444

Filename

967444