Simplified design relationships for silicon integrated optical pressure sensors based on Mach-Zehnder interferometry with antiresonant reflecting optical waveguides

Author

Pavelescu, Ioan

Author_Institution

Nat. Inst. for R&D in Microtechnologies, Bucharest, Romania

Volume

1

fYear

2001

fDate

2001

Firstpage

201

Abstract

In this work, simplified design relationships for silicon integrated optical pressure sensors based on Mach-Zehnder interferometry with antiresonant reflecting optical waveguides are derived. In principle, the analysed sensors are made of a striploaded Mach-Zehnder interferometer (MZI), which is placed on a micromachined rectangular silicon membrane as a pressure sensitive element. Analysis and simulation of optomechanical effects including both photoelastic transduction principles and the photonic transport are performed

Keywords

Mach-Zehnder interferometers; elemental semiconductors; integrated optics; micro-optics; micromachining; microsensors; optical design techniques; optical waveguides; photoelasticity; pressure sensors; sensitivity; silicon; Mach-Zehnder interferometry; Si; antiresonant reflecting optical waveguides; micromachined rectangular silicon membrane; optomechanical effects; photoelastic transduction principles; photonic transport; pressure sensitive element; silicon integrated optical pressure sensors; simplified design relationships; striploaded Mach-Zehnder interferometer; Analytical models; Biomembranes; Integrated optics; Optical design; Optical interferometry; Optical sensors; Optical waveguides; Performance analysis; Photoelasticity; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2001. CAS 2001 Proceedings. International

Conference_Location

Sinaia

Print_ISBN

0-7803-6666-2

Type

conf

DOI

10.1109/SMICND.2001.967446

Filename

967446