DocumentCode :
1932910
Title :
Possibility of porous solids application for gas sensing devices
Author :
Leonov, Ilya A. ; Gunov, Maxim S Mel
Author_Institution :
Inst. of Semicond. Phys., Novosibirsk, Russia
fYear :
2003
fDate :
1-4 July 2003
Firstpage :
105
Lastpage :
106
Abstract :
This paper is devoted to the experimental study of various porous materials and films physical properties during adsorption of organic vapors. The possibility of using these porous sensing cells for organic vapor sensors is discussed.
Keywords :
adsorption; carbon; gas sensors; porous materials; silicon compounds; C; SiO2; adsorption; gas sensing devices; organic vapor sensors; porous films; porous sensing cells; porous solids; Computerized monitoring; Fuels; Organic materials; Polymer films; Semiconductor films; Sensor phenomena and characterization; Sensor systems; Silicon compounds; Solids; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices and Materials, 2003. Proceedings. 4th Annual 2003 Siberian Russian Workshop on
Print_ISBN :
5-7782-0412-4
Type :
conf
DOI :
10.1109/SREDM.2003.1224197
Filename :
1224197
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1932910
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