Plasma-related characteristics of a steady-state glow discharge at atmospheric pressure

Summary form only given. A large-volume (up to 2.8 liters), low-power (less than 200 W), steady-state glow discharge plasma has been generated which allows many surface modification and other plasma processing operations to be carried out at one atmosphere, rather than in expensive vacuum systems which enforce batch processing. The plasma-related characteristics and surface-treatment applications of this atmospheric pressure, steady-state glow discharge have been examined in the present work. The plasma floating potential is measured as a function of RF frequency, RF voltage, and type of working gas. Helium, a mixture of helium and air, and argon are used as working gases. Surface treatment of organic materials has been carried out. This plasma can modify the physical, chemical, and electrical surface properties of the materials.