Title :
2001 International Semiconductor Conference. CAS 2001 Proceedings (Cat. No.01TH8547)
Abstract :
The following topics are dealt with: nanoscience and technology; micromachined microwave devices and circuits; silicon power devices; microelectronics; microoptics and microphotonics; biomedical applications; new materials; silicon carbide power devices; microsystems; modeling
Keywords :
biomedical electronics; micro-optics; micromechanical devices; microwave devices; nanotechnology; semiconductor devices; biomedical applications; microelectronics; micromachined microwave devices; microoptics; microphotonics; microsystems; nanotechnology; power devices; semiconductor devices;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia, Romania
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967454