Author :
Asai, Hironori ; Kudo, Juri-ichi ; Yano, Kci-ichi ; Yasumoto, Taka-aki ; Kimura, Kazuo ; Iyogi, K. ; Moruna, J. ; Yamaguchi, Hitoshi ; Iwasc, Nobuo
Conference_Titel :
IEMT/IMC Symposium, 1997., 1st [Joint International Electronic Manufacturing Symposium and the International Microelectronics Conference]