Title :
Design and manufacturing of a multichannel microprobe for electrical activity recording of neural cells
Author :
Moldovan, Carmen ; Ilian, V. ; Iosub, Rodica ; Modreanu, M. ; Dinoiu, Ioana ; Firtat, B.
Author_Institution :
Dept. of Multidisciplinary Res., Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania
Abstract :
The extracellular potential simultaneous recording permits the investigation of the central nervous activity. The paper presents the design and manufacturing steps of an 8-channel microprobe for recording the electrical activity of neural cells and tissues integrated on the same chip with the electronics. The specific fabrication processes of the integrated microprobe are presented. An implantable neural microprobe is developed to enable the correlation between electrical activity in the human nervous system and external psycho-electrical stimuli. The electronics accomplish the separation and reduction of the biological noise recording
Keywords :
bioelectric phenomena; biological techniques; cellular biophysics; etching; micromachining; neurophysiology; probes; anisotropic etching; biological noise recording; central nervous activity investigation; external psychoelectrical stimuli; fabrication processes; human nervous system; implantable neural microprobe; manufacturing steps; multichannel microprobe; neural cells electrical activity; silicon micromachining; Anisotropic magnetoresistance; Boron; Electronic circuits; Etching; Extracellular; Humans; Manufacturing; Micromachining; Nervous system; Silicon;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967460
