Title :
Implementation of multisensor silicon needles for cardiac applications
Author :
Errachid, A. ; Godignon, P. ; Ivorra, A. ; Millán, J. ; Aguiló, J. ; Baucells, J.
Author_Institution :
Centro Nacional de Microelectron., CSIC, Barcelona, Spain
Abstract :
The technological implementation of needle shaped probes for in vivo medical applications is presented. These probes are characterised by the simultaneous integration of various sensing capabilities: temperature, tissue electrical impedance and extracellular ions (pH and K+). The paper summarises the fabrication processes and describes the in vitro characterisation results
Keywords :
bioelectric phenomena; biothermics; cardiology; cellular biophysics; electric impedance measurement; pH measurement; probes; silicon; temperature measurement; K; K+; Si; cardiac applications; extracellular ions; fabrication processes; in vitro characterisation results; multisensor silicon needles; sensing capabilities integration; tissue electrical impedance; Biomedical equipment; Extracellular; Fabrication; Impedance; In vivo; Medical services; Needles; Probes; Silicon; Temperature sensors;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967462
