Title :
A new improved electrical vernier to measure mask misalignment
Author :
Morrow, D. ; Walton, A.J. ; Gammie, W.R. ; Fallon, M. ; Stevenson, J.T.M. ; Holwill, R.J.
Author_Institution :
Edinburgh Microfabrication Facility, University of Edinburgh, Edinburgh, EH9 3JL; Digital, South Queensferry, West Lothian, EH30 9SH
Abstract :
A new interconnect scheme is proposed which reduces the pad to tooth ratio for passive electrical verniers. This design is based upon the maximum theoretical number of direct connections between N pads which is N(N¿1)/2. This concept is developed further and it is demonstrated that the use of diodes can reduce the ratio to N (N¿1): N. Some experimental results are also presented.
Keywords :
Ammeters; Circuit testing; Current measurement; Digital integrated circuits; Diodes; Electric variables measurement; Fluid flow measurement; Integrated circuit testing; Resistors; Teeth;
Conference_Titel :
Solid State Device Research Conference, 1990. ESSDERC '90. 20th European
Conference_Location :
Nottingham, England
