Title :
PABLO vs. Double-Poly - A Comparison of Two High-Performance Bipolar Technologies
Author :
van Es, R.A. ; Noorlag, D.J.W.
Author_Institution :
Philips Research Laboratories, P.O. Box 80000, 5600 JA Eindhoven, The Netherlands
Keywords :
Anisotropic magnetoresistance; Bipolar transistors; Boron; Capacitance; Dry etching; Grain size; Impurities; Laboratories; Very large scale integration;
Conference_Titel :
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location :
Bologna, Italy
