Title :
A Robotic Vision System With Artificial Intelligence For Automatic Wafer Inspection
Author :
Mital, D.P. ; Teoh, Eam Khwang ; Yong, I.N.
Author_Institution :
School of Electrical & Electronic Engineering, Nanyang Technological Institute
fDate :
Oct. 31 1988-Nov. 2 1988
Keywords :
Artificial intelligence; Fabrication; Inspection; Intelligent robots; Machine vision; Manufacturing automation; Productivity; Robot vision systems; Robotics and automation; Service robots;
Conference_Titel :
Intelligent Robots, 1988., IEEE International Workshop on
Conference_Location :
Tokyo, Japan
DOI :
10.1109/IROS.1988.593297
