Title :
Influence of the operating condition on the poly[tetradecylmethylsiloxane] coated quartz microbalances for heavy hydrocarbon sensing
Author_Institution :
Nat. Inst. of Material Phys., Bucharest-Magurele, Romania
Abstract :
Coated quartz microbalances have been produced by spraying a dichloremethan solution of poly [tetradecylmethylsiloxane] on usual, 10 MHz, AT-cut quartz resonators. Standard sensitivity tests have been performed in a computer controlled system for gases and vapours mixing. The influence of the driving oscillator type, working temperature, and humidity is observed and discussed
Keywords :
crystal resonators; gas sensors; microbalances; organic compounds; polymer films; quartz; spray coatings; 10 MHz; AT-cut quartz resonator; SiO2; computer controlled system; dichloromethane solution; driving oscillator; gas sensor; heavy hydrocarbon detection; humidity dependence; poly[tetradecylmethylsiloxane] coating; quartz microbalance; spray coating; temperature dependence; Control systems; Gases; Hydrocarbons; Oscillators; Performance evaluation; Polymer films; Resonance; Resonant frequency; Spraying; Weight control;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967485
