DocumentCode
1933989
Title
Influence of relative humidity on conductivity of fullerite film [humidity sensor applications]
Author
Berdinsky, Lexander S. ; Krasnoshtanov, Sergey M.
Author_Institution
Novosibirsk State Tech. Univ., Russia
fYear
2003
fDate
1-4 July 2003
Firstpage
260
Lastpage
262
Abstract
The opportunity to use a fullerite film as a device sensitive to moisture content in environmental space is considered. We investigated, as a function of change of resistance with humidity, its usefulness for the preparation of small-sized integrated humidity sensors. Also, this research can be useful for the study of fullerite properties. The dependence of resistance on humidity is based on the whole complex of the phenomena, which arises at the penetration of moisture in a fullerite film.
Keywords
electrical conductivity; fullerene compounds; fullerene devices; humidity sensors; moisture; film moisture penetration; fullerite film conductivity; fullerite properties; humidity dependent resistance; integrated humidity sensors; moisture content sensitive device; relative humidity; Conducting materials; Conductive films; Conductivity; Electrical resistance measurement; Gold; Humidity; Semiconductor films; Silicon; Thermal resistance; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2003. Proceedings. 4th Annual 2003 Siberian Russian Workshop on
Print_ISBN
5-7782-0412-4
Type
conf
DOI
10.1109/SREDM.2003.1224242
Filename
1224242
Link To Document