Interferometric set-up for assessment of a microphotonic pressure sensor

Author

Damian, V. ; Dobroiu, A. ; Apostol, D. ; Nascov, V. ; Garoi, F. ; Oane, M. ; Muller, Raluca

Author_Institution

Nat. Inst. of Laser, Plasma & Radiat. Phys., Bucharest, Romania

Volume

2

fYear

2001

fDate

37165

Firstpage

383

Abstract

For the assessment of a microphotonic pressure sensor device we developed two experimental set-up to have a realistic evaluation of the sensor characteristics. First we used a silicon wafer of 125 (5") mm diameter, as a manometer membrane, in a Fizeau interferometer; to evaluate the global behavior of the wafer; we observed the deformation pattern of the wafer and its mechanical characteristics. From the experimental data obtained we evaluated the possible characteristics of the micro-membrane used in the pressure sensor. The second step will be to measure directly with the Michelson microscopic interferometer, the displacement of the micromembrane as a function of pressure

Keywords

Michelson interferometers; elemental semiconductors; light interferometry; manometers; membranes; micro-optics; microsensors; optical sensors; pressure sensors; silicon; 125 mm; Fizeau interferometer; Michelson microscopic interferometer; Si; manometer micro-membrane; mechanical characteristics; microphotonic pressure sensor; silicon wafer deformation; Biomembranes; Displacement measurement; Interference; Mechanical sensors; Mirrors; Optical interferometry; Optical sensors; Optical surface waves; Sensor phenomena and characterization; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2001. CAS 2001 Proceedings. International

Conference_Location

Sinaia

Print_ISBN

0-7803-6666-2

Type

conf

DOI

10.1109/SMICND.2001.967489

Filename

967489