Title :
Low leakage current evaluations for process characterizations
Author :
Girard, P. ; Pistoulet, B. ; Nouet, P.
Author_Institution :
Laboratoire d´´Automatique et de Microelectronique de Montpellier (U.A. D03710 CNRS), Université de Montpellier II: Sciences et Techniques du Languedoc, Pl. E. Bataillon, 34095 MONTPELLIER Cedex 5, FRANCE
Abstract :
In this paper the principle of operation of a structure allowing accurate determination of currents in the fA range is given. A device has been implemented on silicon and experimentally tested. The capability of 0.1 fA range measurements is demonstrated.
Keywords :
Area measurement; Capacitance measurement; Charge measurement; Current measurement; Energy measurement; Leakage current; Length measurement; MOSFETs; Testing; Time measurement;
Conference_Titel :
Solid State Device Research Conference, 1990. ESSDERC '90. 20th European
Conference_Location :
Nottingham, England
