Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge

Summary form only given. Electron behavior in an electron cyclotron resonance microwave discharge maintained by the TM/sub 01/ mode fields of a cylindrical waveguide has been investigated via a Monte Carlo simulation. Since this discharge has a high degree of ionization (> 1%), a self-consistent simulation of the plasma dynamics is performed using the ponderomotive and Grad-B (-/spl muspl utrisub /spl parB) forces. Accumulation of negative charges on the boundary surface sets up a sheath whose influence is also taken into account. The time averaged, spatially dependent electron energy distribution is computed self-consistently by integrating electron trajectories subject to microwave fields, the divergent background magnetic field, the space charge field, and the sheath field, taking into account electron-electron collisions and collisions with the neutral hydrogen atoms. At low pressures (approximately 0.5 mTorr), the sheath potential is the order of 100 V and decreases with increasing pressure. This observation suggests a pressure range for operation of reactors for diamond-like carbon film deposition.