DocumentCode
1934632
Title
GaAs FET and HFET on InP substrate
Author
Clei, A. ; Azoulay, R. ; Draida, N. ; Biblemont, S. ; Joly, C.
Author_Institution
CENTRE NATIONAL D´´ETUDES DES TELECOMMUNICATIONS, LABORATOIRE DE BAGNEUX, 196 RUE HENRY RAVERA 92220 BAGNEUX (FRANCE). TELEX: CNET BAGNEUX 202 266 F FAX: (1) 45295405
fYear
1990
fDate
10-13 Sept. 1990
Firstpage
237
Lastpage
240
Abstract
GaAs FET and HFET structures have been grown by mismatched MOVPE epitaxy on InP substrates and processed using conventionnal technology. These transistors exhibit characteristics comparable to those measured on GaAs substrate. Ft and Fmax values of 12 and 30 GHz are measured on 1¿m MESFET. Intrinsic transconductance greater than 250 mS/mm have been extracted for 1¿m gatelength DMT.
Keywords
Epitaxial growth; Epitaxial layers; FETs; Gallium arsenide; HEMTs; Indium phosphide; MESFETs; MODFETs; Substrates; Transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1990. ESSDERC '90. 20th European
Conference_Location
Nottingham, England
Print_ISBN
0750300655
Type
conf
Filename
5436448
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