Fabrication and characterization of the oxide-cladding-type AlGaAs-based photonic-crystal slab waveguides sandwiched between partially oxidized ridge waveguides

Author

Tanaka, Y. ; Sugimoto, Y. ; Ikeda, N. ; Asakawa, K. ; Inoue, K. ; Maruyama, T. ; Miyashita, K. ; Ishida, K.

Author_Institution

Femtosecond Technol. Res. Assoc., Tsukuba, Japan

fYear

2003

fDate

14-16 July 2003

Abstract

The paper reports of the fabrication and transmission characterization of the oxide-cladding- (OC) type photonic crystal (PC) slab waveguides (WG). By designing the PC-WG structure sandwiched between conventional ridge WGs and examining experimentally the oxidation, which often causes a strain-related fabrication trouble, the strain-free OC-PC WGs was successfully fabricated. Subsequent transmission characterization demonstrated the good property of the OC-PC waveguides and proved the validity of the fabrication technique.

Keywords

III-V semiconductors; aluminium compounds; gallium arsenide; optical fabrication; optical waveguides; oxidation; photonic crystals; AlGaAs; oxidation; oxide-cladding-type AlGaAs-based photonic-crystal slab waveguides characterization; oxide-cladding-type AlGaAs-based photonic-crystal slab waveguides fabrication; partially oxidized ridge waveguides; strain-related fabrication trouble; transmission characterization; Integrated optics; Nonlinear optics; Optical device fabrication; Optical devices; Optical waveguides; Oxidation; Photonic crystals; Slabs; Ultrafast optics; Waveguide components;

fLanguage

English

Publisher

ieee

Conference_Titel

Holey Fibers and Photonic Crystals/Polarization Mode Dispersion/Photonics Time/Frequency Measurement and Control, 2003 Digest of the LEOS Summer Topical Meetings

Conference_Location

Vancouver, BC, Canada

Print_ISBN

0-7803-7982-9

Type

conf

DOI

10.1109/LEOSST.2003.1224285

Filename

1224285