Ag/AgI quasi-reference microelectrodes

Author

Rivas, I. ; Puente, D. ; Ayerdi, I. ; Castaño, E.

Author_Institution

Centro de Estudios e Investigaciones Tecnicas de Gipuzkoa, San Sebastian, Spain

fYear

2005

fDate

2-4 Feb. 2005

Firstpage

465

Lastpage

468

Abstract

Miniaturization of conventional Ag/AgCl macroscopic electrodes for their integration in chemical microsensors has given rise to several troubles that have reduced the durability and reliability of the reference potential. In this work, Ag/AgI quasi-reference microelectrodes are proposed as an alternative to Ag/AgCl electrodes in order to improve their stability and durability. The fabrication process of the developed samples has been defined in the silicon planar technology field. Silver layer electrodeposition and iodation parameters have been specially studied in order to optimize these fabrication processes. Ag and AgI layers composition, grain size and porosity have been analysed by SEM and EDAX techniques. Additionally, voltage measurements between developed quasi-reference microelectrodes and a commercial SCE macroelectrode have been obtained to determine the former stability.

Keywords

X-ray chemical analysis; chemical sensors; electrodeposition; grain size; microelectrodes; microsensors; scanning electron microscopy; silver; silver compounds; voltage measurement; Ag-AgCl; Ag-AgI; Ag/AgCl electrodes; Ag/AgI quasireference microelectrodes; EDAX technique; SCE macroelectrode; SEM technique; chemical microsensor; grain size; iodation parameter; macroscopic electrodes; silicon planar technology; silver layer electrodeposition; voltage measurement; Chemicals; Electrodes; Fabrication; Grain size; Microelectrodes; Microsensors; Silicon; Silver; Stability; Voltage measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices, 2005 Spanish Conference on

Conference_Location

Tarragona

Print_ISBN

0-7803-8810-0

Type

conf

DOI

10.1109/SCED.2005.1504483

Filename

1504483