Title :
Ag/AgI quasi-reference microelectrodes
Author :
Rivas, I. ; Puente, D. ; Ayerdi, I. ; Castaño, E.
Author_Institution :
Centro de Estudios e Investigaciones Tecnicas de Gipuzkoa, San Sebastian, Spain
Abstract :
Miniaturization of conventional Ag/AgCl macroscopic electrodes for their integration in chemical microsensors has given rise to several troubles that have reduced the durability and reliability of the reference potential. In this work, Ag/AgI quasi-reference microelectrodes are proposed as an alternative to Ag/AgCl electrodes in order to improve their stability and durability. The fabrication process of the developed samples has been defined in the silicon planar technology field. Silver layer electrodeposition and iodation parameters have been specially studied in order to optimize these fabrication processes. Ag and AgI layers composition, grain size and porosity have been analysed by SEM and EDAX techniques. Additionally, voltage measurements between developed quasi-reference microelectrodes and a commercial SCE macroelectrode have been obtained to determine the former stability.
Keywords :
X-ray chemical analysis; chemical sensors; electrodeposition; grain size; microelectrodes; microsensors; scanning electron microscopy; silver; silver compounds; voltage measurement; Ag-AgCl; Ag-AgI; Ag/AgCl electrodes; Ag/AgI quasireference microelectrodes; EDAX technique; SCE macroelectrode; SEM technique; chemical microsensor; grain size; iodation parameter; macroscopic electrodes; silicon planar technology; silver layer electrodeposition; voltage measurement; Chemicals; Electrodes; Fabrication; Grain size; Microelectrodes; Microsensors; Silicon; Silver; Stability; Voltage measurement;
Conference_Titel :
Electron Devices, 2005 Spanish Conference on
Conference_Location :
Tarragona
Print_ISBN :
0-7803-8810-0
DOI :
10.1109/SCED.2005.1504483
