Title :
Microwave field tomography based on microelectromechanical structures
Author :
Vasilache, D. ; Enachescu, R. ; Vladoianu, F. ; Dragoman, M. ; Nitescu, N.
Author_Institution :
IMT - Bucharest, Romania
Abstract :
We present a microwave field tomography method based on nanoelectromechanical structures using the interaction between a microwave field and a nanometer size tip. The modelling of the interaction between the microwave field and the nanometer tip uses phase-space signal processing techniques and a 3D field simulator. The technological implementation of the microwave field tomography sensor is also presented
Keywords :
MMIC; atomic force microscopy; integrated circuit testing; microsensors; microwave imaging; nondestructive testing; tomography; 3D field simulator; MEMS sensor; MMIC; atomic force microscopy; microelectromechanical structures; microwave field tomography; microwave field tomography sensor; microwave field-nanometer size tip interaction; nanoelectromechanical structures; phase-space signal processing; Atomic force microscopy; MMICs; Microwave circuits; Microwave devices; Microwave theory and techniques; Optical sensors; Optical signal processing; Probes; Resonant frequency; Tomography;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967531
