Title :
Polysilicon piezoresistive cantilevers for intermolecular force detection
Author :
Villanueva, G. ; Bausells, J. ; Montserrat, J. ; Perez-Murano, F.
Author_Institution :
Centro Nacional de Microelectron., IMB-CSIC, Barcelona, Spain
Abstract :
We describe the development of polycrystalline silicon piezoresistive micro/nanocantilevers for the measurement of intermolecular forces in biochemical sensing. The cantilevers have been fabricated both in a dedicated technology and in a commercial CMOS technology with an additional micromachining postprocessing. The sensitivity and resolution required by the application are achieved with cantilevers with submicrometer thickness and width in the micrometer range. The cantilevers have been successfully tested by applying a known displacement with an AFM, obtaining a value of 12 for the gauge factor.
Keywords :
CMOS integrated circuits; biomolecular electronics; biosensors; chemical sensors; intermolecular forces; micromachining; piezoresistive devices; AFM; CMOS technology; biochemical sensing; gauge factor; intermolecular force detection; micromachining postprocessing; piezoresistive microcantilever; piezoresistive nanocantilever; polycrystalline silicon; polysilicon piezoresistive cantilever; Atomic force microscopy; CMOS process; CMOS technology; Force measurement; Micromachining; Piezoresistance; Silicon; Springs; Testing; Voltage;
Conference_Titel :
Electron Devices, 2005 Spanish Conference on
Conference_Location :
Tarragona
Print_ISBN :
0-7803-8810-0
DOI :
10.1109/SCED.2005.1504494
