Title :
Simulation and design of a resonant polysilicon microbridge
Author :
Vasile, Gabriel ; Lepadatu, Cristian ; Moldovan, Carmen ; Nedelcu, Oana
Author_Institution :
Dept. of Eng. Sci., Politehnica Univ., Bucharest, Romania
Abstract :
Chemical or mechanical microsensors based on resonant microstructures can be produced in microsystems silicon technology. Detection is related to a shift of the resonant frequency of a microbridge by means of a laser beam. The use of conductive polysilicon is appropriate for fabrication of the structure. This paper develops a reliable electromechanical model for design of the device and its technological process. By MemCAD and MathCAD software the dynamic behaviour is numerically simulated. Random deviations for physical and technological parameters were also simulated by the Monte Carlo method
Keywords :
Monte Carlo methods; chemical sensors; elemental semiconductors; micromechanical resonators; microsensors; semiconductor device models; silicon; MathCAD software; MemCAD software; Monte Carlo method; Si; chemical microsensors; conductive polysilicon; design; dynamic behaviour; electromechanical model; laser beam; mechanical microsensors; microbridge resonant frequency shift; numerical simulation; random deviations; resonant microstructures; resonant polysilicon microbridge; simulation; Chemical lasers; Chemical technology; Laser beams; Laser modes; Laser theory; Microsensors; Microstructure; Resonance; Resonant frequency; Silicon;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967532
