Title :
FEM simulations to estimate the polymer thickness deposited over mechanical resonators
Author :
Morata, M. ; García, M. ; Santos, J.P. ; Sayago, I. ; Fernandez, M.J. ; Horrillo, M.C. ; Figueras, E. ; Fonseca, L. ; Santander, J. ; Gràcia, I. ; Cané, C.
Author_Institution :
Inst. de Microelectron. de Barcelona, CNM-CSIC, Bellaterra, Spain
Abstract :
Measurements of polymer thicknesses deposited over resonant structures are difficult to carry out through optical or mechanical techniques. This paper proposes to estimate the equivalent thickness of the sensitive layer using FEM simulations. Resonant frequency before and after the polymer (PEUT or PDMS) has been sprayed showed that thicknesses varied between 0.1 μm and 6.5 μm.
Keywords :
chemical sensors; finite element analysis; microsensors; polymers; thickness measurement; 0.1 to 6.5 micron; FEM simulations; equivalent thickness; mechanical resonators; mechanical technique; optical technique; polymer thickness; resonant frequency; Actuators; Chemical sensors; Optical polymers; Optical resonators; Resonance; Resonant frequency; Silicon; Spraying; Temperature sensors; Vibrations;
Conference_Titel :
Electron Devices, 2005 Spanish Conference on
Conference_Location :
Tarragona
Print_ISBN :
0-7803-8810-0
DOI :
10.1109/SCED.2005.1504509
