Improvement of the gas sensing properties of RF sputtered WO/sub 3/ thin films using different dopants

Author

Stankova, M. ; Caiderer, J. ; Vilanova, X. ; Llobet, E. ; Gratia, I. ; Cané, C. ; Correig, X.

Author_Institution

Dept. Enginyeria Electronica, Univ. Rovira i Virgili, Tarragona, Spain

fYear

2005

fDate

2-4 Feb. 2005

Firstpage

553

Lastpage

556

Abstract

The influence of several dopants (Pt, Au, Ag, Ti, SnO₂, ZnO and ITO) on the response of tungsten oxide based microhotplate gas sensors was investigated. It was found that gold improved the sensitivity to H₂S. On the other hand, doping with Ag and Pt leaded to high responses to NO₂ and NH₃, respectively. The influence of the working temperature on the sensor behaviour was also studied. It was demonstrated that combining sensors with different dopants, selective gas detection is possible.

Keywords

ammonia; doping; gas sensors; gold; hydrogen compounds; microsensors; nitrogen compounds; platinum; semiconductor thin films; silver; sputtering; tin compounds; titanium; tungsten compounds; zinc compounds; H/sub 2/S; NH/sub 3/; NO/sub 2/; WO/sub 3/:Ag; WO/sub 3/:Au; WO/sub 3/:ITO; WO/sub 3/:Pt; WO/sub 3/:SnO/sub 2/; WO/sub 3/:Ti; WO/sub 3/:ZnO; WO3:InSnO; dopants; gas detection; gas sensing property; microhotplate gas sensors; rf sputtering; sensor behaviour; thin films; tungsten oxide; Filters; Gas detectors; Gases; Gold; Indium tin oxide; Radio frequency; Sensor arrays; Sputtering; Tungsten; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices, 2005 Spanish Conference on

Conference_Location

Tarragona

Print_ISBN

0-7803-8810-0

Type

conf

DOI

10.1109/SCED.2005.1504512

Filename

1504512