Title :
Improvement of the gas sensing properties of RF sputtered WO/sub 3/ thin films using different dopants
Author :
Stankova, M. ; Caiderer, J. ; Vilanova, X. ; Llobet, E. ; Gratia, I. ; Cané, C. ; Correig, X.
Author_Institution :
Dept. Enginyeria Electronica, Univ. Rovira i Virgili, Tarragona, Spain
Abstract :
The influence of several dopants (Pt, Au, Ag, Ti, SnO 2, ZnO and ITO) on the response of tungsten oxide based microhotplate gas sensors was investigated. It was found that gold improved the sensitivity to H 2S. On the other hand, doping with Ag and Pt leaded to high responses to NO 2 and NH 3, respectively. The influence of the working temperature on the sensor behaviour was also studied. It was demonstrated that combining sensors with different dopants, selective gas detection is possible.
Keywords :
ammonia; doping; gas sensors; gold; hydrogen compounds; microsensors; nitrogen compounds; platinum; semiconductor thin films; silver; sputtering; tin compounds; titanium; tungsten compounds; zinc compounds; H/sub 2/S; NH/sub 3/; NO/sub 2/; WO/sub 3/:Ag; WO/sub 3/:Au; WO/sub 3/:ITO; WO/sub 3/:Pt; WO/sub 3/:SnO/sub 2/; WO/sub 3/:Ti; WO/sub 3/:ZnO; WO3:InSnO; dopants; gas detection; gas sensing property; microhotplate gas sensors; rf sputtering; sensor behaviour; thin films; tungsten oxide; Filters; Gas detectors; Gases; Gold; Indium tin oxide; Radio frequency; Sensor arrays; Sputtering; Tungsten; Zinc oxide;
Conference_Titel :
Electron Devices, 2005 Spanish Conference on
Conference_Location :
Tarragona
Print_ISBN :
0-7803-8810-0
DOI :
10.1109/SCED.2005.1504512
