Title :
Micro-cantilevers for gas sensing
Author :
Morata, M. ; Amirola, J. ; Figueras, E. ; Fonseca, L. ; Santander, J. ; Gracia, I. ; Dominguez, M. ; Rodriguez, A. ; Horrillo, MC ; Cané, C.
Author_Institution :
Centre Nacional de Microelectron., CSIC, Barcelona, Spain
Abstract :
Cantilevers fabricated from a SOI wafers using bulk micromachining are used in combination with polymer deposition to detect down to 25 ppm of toluene concentration in synthetic air. The cantilevers proposed are thermoelectrically actuated and the movement detection is done by piezoresistance in a Wheatstone bridge configuration.
Keywords :
air pollution measurement; gas sensors; microactuators; microsensors; piezoelectric devices; silicon-on-insulator; SOI wafers; Wheatstone bridge; bulk micromachining; gas sensing; microcantilevers; movement detection; piezoresistance; polymer deposition; synthetic air; toluene concentration; Actuators; Bridge circuits; Etching; Gas detectors; Optical resonators; Optical sensors; Piezoresistance; Resonance; Sensor arrays; Silicon;
Conference_Titel :
Electron Devices, 2005 Spanish Conference on
Conference_Location :
Tarragona
Print_ISBN :
0-7803-8810-0
DOI :
10.1109/SCED.2005.1504516
