DocumentCode

1936087

Title

Sputter-deposited FeCoBC/AlN/sub x/ multilayered films for wet-etching process

Author

Tomita, H. ; Inoue, Takeru ; Mizoguchi, T. ; Sato, T.

Author_Institution

TOSHIBA Corp.

fYear

1999

fDate

18-21 May 1999

Keywords

Aluminum; Amorphous materials; Annealing; Conductivity; Darmstadtium; Eddy currents; Electric resistance; Etching; Nitrogen; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-5555-5

Type

conf

DOI

10.1109/INTMAG.1999.837929

Filename

837929