Title :
Efficient and waiting time violation-free furnace tool allocation via integration of sequencing constraints
Author :
Kao, Yu-Ting ; Zhan, Shun-Cheng ; Chang, Shi-Chung
Author_Institution :
Taipei, Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
Furnace tool group is very often a bottleneck in semiconductor fabrication. Furnace tools are characterized by long processing times with batching requirements, stringent limitations on times to wait for furnace processing and heterogeneous configurations of individual tools. Effective furnace tool scheduling is very important to improve productivity and reduce production cycle time, but is quite challenging to fab operation management because of its complexity.
Keywords :
batch processing (industrial); flow production systems; furnaces; lead time reduction; productivity; resource allocation; scheduling; semiconductor device manufacture; batching requirements; furnace tool scheduling; processing times; production cycle time reduction; productivity improvement; semiconductor fabrication; sequencing constraints; waiting time violation-free furnace tool allocation; Furnaces; Inductors; Production; Resource management; Robot kinematics; Time factors; efficiency; furnace tool allocation; integration of sequencing constraints; optimization; waiting time constraints;
Conference_Titel :
e-Manufacturing & Design Collaboration Symposium (eMDC), 2012
Conference_Location :
HsinChu
Print_ISBN :
978-1-4673-4540-8
DOI :
10.1109/eMDC.2012.6338422
