Title :
Yield impact evaluation of abnormal APC data
Abstract :
When a lot yield is low, it used to survey the related APC data whether it shows the abnormal signal and could be detected early to minimize the yield loss. The paper proposes to identify the yield impact by using the abnormal data detected by checking the trend or from the frequency alarm of FDC.
Keywords :
control engineering computing; data mining; process control; production engineering computing; production management; FDC frequency alarm; abnormal APC data; advanced process control; lot yield; yield impact evaluation; yield loss minimization; Collaboration; Data mining; Decision trees; Facsimile; Humans; Market research; Software; APC; data mining; decision tree; yield;
Conference_Titel :
e-Manufacturing & Design Collaboration Symposium (eMDC), 2012
Conference_Location :
HsinChu
Print_ISBN :
978-1-4673-4540-8
DOI :
10.1109/eMDC.2012.6338425
