Title :
An application of d-JADE controller in thin film processes
Author_Institution :
Nanya Technol. Corp., Taiwan
Abstract :
This paper demonstrates an algorithm “double Just-in-time Adaptive Disturbance Estimation (d-JADE)” for use in on-line run-to-run control. This method is used to adaptively identify the contributions to variation from each individual context item. Through monitoring the data of both EWMA and d-JADE algorithms on-line, it appears that d-JADE provides increasingly superior performance in state estimation over EWMA.
Keywords :
adaptive control; control system synthesis; manufacturing processes; semiconductor device manufacture; thin films; EWMA algorithm; d-JADE controller; data monitoring; double just-in-time adaptive disturbance estimation; online run-to-run control; state estimation; thin film process; Algorithm design and analysis; Context; Estimation; Feedback loop; Monitoring; Process control; Radio frequency; High-mix; JADE; R2R;
Conference_Titel :
e-Manufacturing & Design Collaboration Symposium (eMDC), 2012
Conference_Location :
HsinChu
Print_ISBN :
978-1-4673-4540-8
DOI :
10.1109/eMDC.2012.6338427
