Sensor based on arrays of sub-micrometer scale resonant silicon cantilevers integrated monolithically with CMOS circuitry

Author

Villarroya, María ; Verd, Jaume ; Teva, Jordi ; Abadal, Gabriel ; Figueras, Eduard ; Pérez-Murano, Francesc ; Esteve, Jaume ; Barniol, Núría

Author_Institution

Departament d´´Enginyeria Electronica, Univ. Autonoma de Barcelona, Bellaterra, Spain

fYear

2005

fDate

2-4 Feb. 2005

Firstpage

603

Lastpage

606

Abstract

A mass sensor, based on arrays of cantilevers for multiple detection, is presented. Excitation and readout is performed electrostatically. Polysilicon cantilevers are integrated monolithically with CMOS in a compatible process. Integration of arrays of cantilever allows performing multiple detections on the same device. A multiplexing system to select individual cantilevers is implemented as well as a scheme based on two readout circuits for differential measurements. A mass resolution of 5·10^-18 g has been achieved in the first working devices.

Keywords

CMOS integrated circuits; mass measurement; microactuators; microsensors; monolithic integrated circuits; readout electronics; CMOS circuitry; mass resolution; mass sensor; multiple detections; multiplexing system; polysilicon cantilevers; readout circuits; resonant silicon cantilevers; Biosensors; Chemical and biological sensors; Driver circuits; Integrated circuit measurements; RLC circuits; Resonance; Resonant frequency; Sensor arrays; Silicon; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices, 2005 Spanish Conference on

Conference_Location

Tarragona

Print_ISBN

0-7803-8810-0

Type

conf

DOI

10.1109/SCED.2005.1504530

Filename

1504530