Title :
FDC coverage improvement infrastructure
Author :
Lain Hua Shih ; Cheng, Ming ; Hseih, T.
Author_Institution :
United Microelectron. Corp., Hsinchu, Taiwan
Abstract :
Traditional method of selecting SVID, setting up FDC models and SPC alarm rules often depends on past experiences and abnormal cases. It´s hard to achieve the overall FDC coverage across different tool types. This paper adopts EQ subsystems concept into FDC model template and roll out these models throughout the fab by using combine charts. It can rapidly improve FDC coverage rate and hit rate for tool abnormity.
Keywords :
control charts; machine tools; statistical process control; EQ subsystem; FDC coverage; FDC coverage rate; FDC hit rate; FDC model; SPC alarm rule; SVID selection; combine chart; statistical process control; tool abnormity; tool type; Data models; Helium; Monitoring; Radio frequency; Temperature measurement; Temperature sensors; Valves; EQ Subsystems; FDC;
Conference_Titel :
e-Manufacturing & Design Collaboration Symposium (eMDC), 2012
Conference_Location :
HsinChu
Print_ISBN :
978-1-4673-4540-8
DOI :
10.1109/eMDC.2012.6338428
