Title :
FOUP environment control and condense reduction
Author :
Kuo, Yiting ; Tsao, Howard ; Luoh, Tuung ; Yang, Ling-Wu ; Yang, Tahone ; Chen, Kuang-Chao ; Lu, Chih-Yuan
Author_Institution :
Technol. Dev. Center, Macronix Int. Co. Ltd., Hsinchu, Taiwan
Abstract :
The effects on the mini-environment of FOUP (Front Opening Unified Pod) by N2 purge are evaluated with various processes. From the experimental results, it is effective to suppress the formation of condense defect, corrosion defect and extend the queue time at critical process steps.
Keywords :
air pollution control; contamination; corrosion; integrated circuit manufacture; nitrogen; FOUP condense reduction; FOUP environment control; condense defect formation; corrosion defect; front opening unified pod; integrated circuit; minienvironment effect; nitrogen purge; Corrosion; Humidity; Integrated circuits; Surface cleaning; Surface contamination; Condense; Defect; FOUP Contamination; Ionic Chromatography Analysis; N2 Purge;
Conference_Titel :
e-Manufacturing & Design Collaboration Symposium (eMDC), 2012
Conference_Location :
HsinChu
Print_ISBN :
978-1-4673-4540-8
DOI :
10.1109/eMDC.2012.6338434
