Title :
Miniaturized Accelerometers Based on Silicon Micromachining Techniques
Author :
Benecke, W. ; Riethmuller, W. ; Schnakenberg, U. ; Wagner, B.
Author_Institution :
Fraunhofer-Institut fÿr Mikrostrukturtechnik, Dillenburger Str. 53, D-1000 Berlin 33, Federal Republic of Germany
Abstract :
A miniaturized acceleration sensor has been fabricated using silicon micromachining techniques. Integrated monocrystalline silicon piezoresistors are used to detect the bending of a beam attached to a seismic mass. An outline is presented for improvement of the sensor performance with respect to temperature sensitivity and overrange protection.
Keywords :
Accelerometers; Capacitive sensors; Etching; Micromachining; Particle beams; Piezoresistive devices; Sensor systems and applications; Silicon; Structural beams; Temperature sensors;
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany
