DocumentCode
1936558
Title
Sensitivities improvement by utilizing dark mode of bright filed inspection
Author
Li, Hsiao-Leng ; Chung, Yen ; Hung, Che-Lung ; Luoh, Tuung ; Yang, Ling-Wu ; Yang, Tahone ; Chen, Kuang-Chou ; Lu, Chih-Yuan
Author_Institution
Technol. Dev. Center, Macronix Int. Co. Ltd., Hsinchu, Taiwan
fYear
2012
fDate
4-4 Sept. 2012
Firstpage
1
Lastpage
2
Abstract
Advanced bright field (BF) inspection tool bundles with many powerful features to improve its resolution and sensitivity. However, it usually takes much time for creating an effective monitoring recipe for suppressing the background signal. This paper demonstrates the benefit of BF dark mode inspection for suppressing the interferences of nuisance and pre-layer.
Keywords
inspection; semiconductor technology; BF dark mode inspection; BF inspection tool; background signal suppression; bright field inspection; nuisance interference suppression; prelayer interference suppression; sensitivity improvement; wafer noise; Broadband communication; Etching; Image edge detection; Inspection; Lighting; Monitoring; Sensitivity; Bright Field Inspection; Bright Mode; Dark Mode; Defect of Interest; Sensitivity;
fLanguage
English
Publisher
ieee
Conference_Titel
e-Manufacturing & Design Collaboration Symposium (eMDC), 2012
Conference_Location
HsinChu
Print_ISBN
978-1-4673-4540-8
Type
conf
DOI
10.1109/eMDC.2012.6338439
Filename
6338439
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