Title :
Intrinsic Gettering : Sense or Nonsense ?
Author :
Vanhellemont, J. ; Claeys, C.
Author_Institution :
Interuniversity Micro-Electronics Center (IMEC), Kapeldreef 75, B-3030 Leuven, Belgium
Abstract :
The implementation of intrinsic gettering in integrated circuit processing is discussed in view of new insights in the parameters influencing precipitate formation in silicon and in the dependence of the yield stress on point defect concentrations.
Keywords :
Cooling; Genetic expression; Gettering; Impurities; Integrated circuit yield; Silicides; Silicon; Surface contamination; Temperature; Tensile stress;
Conference_Titel :
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location :
Bologna, Italy
