Title :
Composition and process dependence of sputtered NiFe thin films
Author :
Byun, Chongwon ; Xiong, Wei
Author_Institution :
MKE Quantum Components
Keywords :
Atomic measurements; Iron; Magnetic anisotropy; Magnetic field measurement; Magnetic films; Magnetostriction; Perpendicular magnetic anisotropy; Rough surfaces; Sputtering; Stress;
Conference_Titel :
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-5555-5
DOI :
10.1109/INTMAG.1999.837956