Title :
A Monolithic Integrated Active Thin Film Head for Magnetic Recording-An Example for a Combination Technology Suitable for Smart Sensors
Author :
Rudolph, H. ; Vernie, K. ; Seitzer, D.
Author_Institution :
Lehrstuhl fÿr Technische Elektronik, Universitÿt Erlangen - Nÿrnberg, CauerstraÃ\x9fe 9, 8520 Erlangen, FRG
Keywords :
Intelligent sensors; Magnetic films; Magnetic heads; Magnetic recording; Magnetic sensors; Protection; Semiconductor thin films; Sputtering; Temperature sensors; Thin film sensors;
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany