DocumentCode :
1936725
Title :
A Monolithic Integrated Active Thin Film Head for Magnetic Recording-An Example for a Combination Technology Suitable for Smart Sensors
Author :
Rudolph, H. ; Vernie, K. ; Seitzer, D.
Author_Institution :
Lehrstuhl fÿr Technische Elektronik, Universitÿt Erlangen - Nÿrnberg, CauerstraÃ\x9fe 9, 8520 Erlangen, FRG
fYear :
1989
fDate :
11-14 Sept. 1989
Firstpage :
597
Lastpage :
600
Keywords :
Intelligent sensors; Magnetic films; Magnetic heads; Magnetic recording; Magnetic sensors; Protection; Semiconductor thin films; Sputtering; Temperature sensors; Thin film sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany
Print_ISBN :
0387510001
Type :
conf
Filename :
5436533
Link To Document :
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