DocumentCode
1938277
Title
Numerical Simulation of Gas Flow and Temperature in a Diffusion Furnace
Author
Howell, S. ; Ulacia F., J.I. ; Werner, Ch.
Author_Institution
Siemens AG., Corporate Research and Development, EL PT 33,8000 Munich 83, West Germany.
fYear
1989
fDate
11-14 Sept. 1989
Firstpage
302
Lastpage
305
Keywords
Conductivity; Design optimization; Equations; Fluid flow; Furnaces; Manufacturing automation; Manufacturing processes; Numerical simulation; Semiconductor device modeling; Temperature distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location
Berlin, Germany
Print_ISBN
0387510001
Type
conf
Filename
5436607
Link To Document