Title :
Investigating MBE MCT layers by using scanning laser microscopy
Author :
Pak, Pavel Y. ; Fateev, Vladimir A. ; Shashkin
Author_Institution :
Inst. of Semicond. Phys., Novosibirsk, Russia
Abstract :
By using scanning laser microscopy (SLM) technique, spatial distribution electrically active areas in MBE grown Hg1-xCdxTe (MCT) layers with composition x=0,22 and x=0,3 as well as in MCT based planar photodiode arrays was explored. Correlation between the result of SLM studies of the fragment of the planar photodiodes array and their current-voltage dependencies were discovered. Spatial distribution of the electrical nonuniformities in the volume of MCT epitaxial film was discovered by using step-by-step etching. The comparison SLM images of the fragment of MBE grown MCT layer to profiles of the spatial distribution of the background impurities (C, Cu, As, Li) concentration, found by using secondary ion mass-spectroscopy (SIMS) technique, allows to speak about correlation of the spatial distribution of the electrical nonuniformities with spatial distribution of the background impurities.
Keywords :
II-VI semiconductors; arsenic; cadmium compounds; carbon; copper; doping profiles; etching; impurity distribution; infrared detectors; lithium; mercury compounds; optical arrays; optical microscopy; photodetectors; photodiodes; secondary ion mass spectra; semiconductor doping; semiconductor epitaxial layers; GaAs; HgCdTe:C,Cu,As,Li; MBE MCT layers; MCT epitaxial film; SIMS; SLM; current-voltage characteristics; doping profiles; electrical nonuniformity distribution; etching; impurity distribution; planar photodiode arrays; scanning laser microscopy; secondary ion mass spectroscopy; Cadmium compounds; Carbon; Copper; Etching; Infrared detectors; Lithium; Mass spectroscopy; Mercury compounds; Microscopy; Photodetectors; Photodiodes; Semiconductor device doping; Semiconductor epitaxial layers;
Conference_Titel :
Electron Devices and Materials, 2004. Proceedings. 5th Annual. 2004 International Siberian Workshop on
Print_ISBN :
5-7782-0463-9
DOI :
10.1109/PESC.2004.241047